溶胶-凝胶法制备V_2O_5薄膜的气敏特性研究  

Gas Sensing Properties of V_2O_5 Thin Films Fabricated by Sol Gel Technology

作　　者：童茂松[1] 戴国瑞[1] 薛辉 何秀丽[1] 吴元大 高鼎三[1] 

机构地区：[1]吉林大学电子工程系,集成光电子国家重点联合实验室,长春130023

出　　处：《传感技术学报》2000年第3期225-229,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然基金资助项目!( 6 9776 0 38);国际合作项目资助

摘　　要：本文研究了用无机溶胶凝胶法制备的 V2 O5 薄膜的 XRD结果及其气敏特性 .凝胶在 40 0℃下烧结 12 h后完全形成了 V2 O5 晶体 .掺 3wt% Pd+1wt% Au的 V2 O5 薄膜在较大范围内对乙醇具有较高的灵敏度 .加热电压为 5 .5 V时灵敏度达到最大值 .该气敏薄膜具有较好的选择性 ,NH3、H2 、CO、CH3COCH3等气体不干扰元件的测量 .元件的响应时间为15 s,恢复时间为 5 s.The results of XRD and gas sensing properties of V\-2O\-5 thin films, which are formed by sol Gel technology, are reported in this paper. The thin films with a n additive of 3wt%Pd+1wt% Au have a high sensitivity to C\-2H\-5OH in the wide r ange of concentration. The sensitivity reaches the highest when the heating volt age is 5.5V. The thin gas film sensors have a good selectivity and their detecti on to C\-2H\-5OH isn’t influenced by NH\-3, CO,H\-2 and CH\-3COCH\-3. The respo n se and the recover time are 15 s and 5 s, respectively. The XRD analysis shows t hat V\-2O\-5 crystalline are formed when annealing at 400℃ for 12 hours.

关 键 词：溶胶-凝胶法 V2O5薄膜 气体传感器 气敏特性 

分 类 号：O484.4[理学—固体物理]