溶胶-凝胶法制备氧化钒薄膜的结构及特性研究  

Study on structures and properties of vanadium oxide films prepared by Sol-Gel

作　　者：何琼[1] 许向东[1] 温粤江[1] 蒋亚东[1] 马春前[1] 敖天宏[1] 黄锐[1] 孙自强[1] 

机构地区：[1]电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《实验技术与管理》2013年第3期35-38,共4页Experimental Technology and Management

基　　金：国家自然科学基金"太赫兹室温探测器的基础研究"(批准号:61071032)资助课题

摘　　要：利用溶胶-凝胶法制备了氧化钒薄膜,在大气环境及400℃下、对产物进行不同时间的退火处理。利用扫描电子显微镜、X射线衍射仪、高阻仪、紫外-可见分光光度计和傅里叶红外光谱仪,对薄膜的形貌、晶态、电学和光学特性等进行了系统的分析。结果表明,退火时间明显地影响溶胶-凝胶法制备氧化钒薄膜的化学结构及光电性能:退火时间过短,薄膜中有机成分不能完全分解、并且结晶度低;退火1h时,薄膜主要成分为V2O5和VO2,此时薄膜电阻低、但光吸收性弱;退火2h以上,薄膜中的主要成分为V2O5,此时薄膜电阻变大、但光吸收性有所加强。研究了退火时间对溶胶-凝胶制备氧化钒薄膜的化学结构及光电特性的影响,揭示了相关的微观机理。Vanadium oxide films were prepared by Sol-Gel at different annealing times in the atmospheric environment under 400 ℃.Their surface morphologies,valence states,electrical and optical properties were characterized by SEM,XRD,resistance meter,UV-Vis spectrometer and FTIR,respectively.Results reveal that the annealing time has great influence on the structures and properties of vanadium oxide films： the organics in the films cannot be decomposed completely under 0.5 h;after 1 h,the films mainly consist of V2O5 and VO2 with low resistance and optical absorption;while after annealing for a long time（ 2 h）,the major component of the films is V2O5,and such materials exhibit high film resistance and large optical absorption.This paper indicates the effect of annealing time on the microstructures and optical properties of vanadium oxide films,and reveals the growth mechanism of vanadium oxide films prepared by Sol-Gel.

关 键 词：氧化钒薄膜 溶胶-凝胶 退火 

分 类 号：TB43[一般工业技术] TN213[电子电信—物理电子学]