基于迈克尔逊干涉原理的孔径测量及装置设计  

Aperture Measurement which Based on Michelson Interference Principle and Design of Device

作　　者：王家贵 李林峰[2] 

机构地区：[1]哈尔滨量具刃具集团有限责任公司 [2]中国计量学院

出　　处：《工具技术》2013年第4期58-60,共3页Tool Engineering

摘　　要：由于测量空间限制和孔本身的特点,孔径测量难度较大。本文设计一种简单易行、高精确度的测量方案,并对孔径载物台进行了设计。其干涉原理采用迈克尔逊干涉原理,数据的采集则采用CCD传感器。可以在大多数情况下实现孔径的测量,其测量精度达到微米级别。Due to the measurement space＇s limitation and hole itself characteristic, the aperture measurement is difficult. The paper presents the design of a simple and high precision measurement scheme and the design of stage which to carry on aperture . The principle of interference is Michelson interference principle, data collection is use of the CCD sensor. In most cases to realize the measurement of aperture, and the accuracy of measurement reach to micron level.

关 键 词：非接触测量 干涉原理 迈克尔逊干涉仪 光电耦合器件 

分 类 号：TG802[金属学及工艺—公差测量技术] TP2[自动化与计算机技术—检测技术与自动化装置]