PLZT非晶薄膜光学性质研究  

OPTICAL PROPERTIES OF LEAD LANTHANUM ZIRCONATE TITANATE AMORPHOUS THIN FILMS

作　　者：李辉遒[1] 张曰理[1] 文锦辉[1] 阳生红[1] 莫党[1] 许煜寰[2] J.D.Mackenize 

机构地区：[1]中山大学物理系,广州510275 [2]加州大学材料与工程系

出　　处：《红外与毫米波学报》2000年第3期201-204,共4页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金!(编号 1 98740 81 )资助项目&&

摘　　要：用溶胶 -凝胶技术制备了化学组分为 5 /5 0 /5 0的 PL ZT非晶薄膜 .测试其在 2 0 0～ 80 0 nm波长范围的光学透射谱 ,和 2 0 0～ 6 70 nm波长范围的椭偏光谱 .得到了 PL ZT(5 /5 0 /5 0 )非晶薄膜膜厚和光学常数谱 (折射率 n谱和消光系数 k谱 ) ,并与组分为 9/6 5 /35的 PL ZT非晶薄膜的吸收边和折射率进行了比较 .Lead lanthanum zirconate titanate (PLZT) amorphous films with composition of 5/50/50 were prepared by the sol gel technique. The optical transmission properties of the thin film were measured in the wavelength range 200 to 820nm. The ellipsometric spectra of the PLZT film on glass substrate were measured in the wavelength range 200 670nm. The thicknesses of the films and their optical constants (refractive index n and extinction coefficient k ) spectra were obtained. The absorption edges and the refractive index of PLZT amorphous films with different composition were compared.

关 键 词：PLZT 非晶薄膜 椭偏光谱 光学常数 

分 类 号：O484.41[理学—固体物理]