集成电路芯片管脚尺寸自动检测的研究与实现  

Research and application of automated inspection on integrated circuit chip pin size

作　　者：左建中[1] 张新荣[1] 王刚[1] 张钢[1] 

机构地区：[1]天津大学,天津300072

出　　处：《制造业自动化》2000年第9期28-29,40,共3页Manufacturing Automation

基　　金：天津市自然科学基金

摘　　要：集成电路芯片管脚尺寸是否合格，是芯片自动化安装的关键。本文应用机器视觉和机械自动化技术，研制自动检测设备，实现集成电路芯片管脚尺寸检测自动化。实验测试表明，该设备具有较高的检测精度和检测速度，检测结果满足生产要求。It is important for assembling integrated circuit chips that integrated circuit chip pin size is eligible.In this paper,we develop an automated inspection device by computer vision and mechanical automatization technology,to realize the automated inspection on integrated circuit chip pin size.The results of our experiments show that,this device can get high precision and high speed,and the detection results satisfy the needs of practical production.

关 键 词：集成电路芯片 管脚尺寸自动检测 机器视觉 

分 类 号：TN407[电子电信—微电子学与固体电子学] TP274[自动化与计算机技术—检测技术与自动化装置]