锁相倍频式光栅检测系统及其应用  

Phase- locked Multi- frequency Grating Detecting System and Its Application

作　　者：金喜平[1] 刘雪艳[1] 葛岷[1] 

机构地区：[1]沈阳工业大学

出　　处：《制造技术与机床》2000年第11期32-34,共3页Manufacturing Technology & Machine Tool

摘　　要：介绍了锁相倍频式光栅检测系统的工作原理及硬件组成。该系统采用锁相倍频式细分方法 ,具有较高的测量精度。s:The principle and hardware design of phase- locked multi- frequency grating detecting system is introduced in this paper.The phase- locked multi- frequency division theory is used in this system and higher measuring accuracy is achieved. Atthe end of the paper,the grating digital readoutis given as an example of this system.

关 键 词：光栅检测系统 锁相倍频 细分 位移传感器 

分 类 号：TH741.6[机械工程—光学工程] TH822.032[机械工程—仪器科学与技术]