基于非线性最小二乘拟合法的Mueller矩阵椭偏仪  

Mueller Matrix Ellipsometer Based on Nonlinear Least Squares Fitting Method

作　　者：侯俊峰[1,2] 王东光[1] 邓元勇[1] 孙英姿[1] 张志勇[1] 

机构地区：[1]中国科学院国家天文台太阳活动重点实验室,北京100012 [2]中国科学院大学,北京100049

出　　处：《中国激光》2013年第4期179-186,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(11273034;11178005;10903015)资助课题

摘　　要：提出了一种利用非线性最小二乘拟合法自校准测量偏振元件Mueller矩阵参数的新方法。通过测量放入待测样品前后输出偏振态的Stokes参数,建立起由测得的输出偏振态参数、系统未知参数与被测样品的Mueller矩阵之间的函数关系式,使用多参数的非线性最小二乘拟合求解得到待测样品的Mueller矩阵。建立了一套基于铁电液晶波片、旋转波片及偏振片的光谱型Mueller矩阵椭偏仪,并通过自编的Labview自动控制软件实现了智能化测量。误差分析和实际测量结果表明,在600～900nm波长范围内,Mueller矩阵元参数的测量精度在0.01以内,重复性精度达到0.005。该测量系统无需对系统进行复杂的定标,简化了测量过程,实现了Mueller矩阵元参数的自校准测量。A Mueller matrix measuring method is brought forward based on nonlinear least squares fitting. Stokes parameters of output polarization state are measured, and functions between output polarization states, the system unknown parameters and sample＇s Mueller matrix are built. Nonlinear least squares fitting method is used to calculate sample＇s Mueller matrix. Then a Mueller matrix ellipsometer measuring system based on ferroelectric liquid crystal retarders and rotating waveplate and rotating polarizer is established, the Labview software is applied to realize the intelligent. Error analysis and measurement are done. It is found that the Mueller matrix measuring precision of the system is within 0.01 and repeatability is 0. 005 in wavelength range 600-900 nmo The measuring system avoids the complex calibration of Mueller matrix ellipsometer as before, simplifying measuring procedures and realizing the self-calibration measurement.

关 键 词：测量 MUELLER矩阵 非线性最小二乘拟合 偏振元件 铁电液晶 旋转波片 

分 类 号：O439[机械工程—光学工程]