分体型萨格奈克干涉仪的精密装调  

Precise Alignment of Separated Sagnac Interferometer

作　　者：张学敏[1,2] 魏儒义[1,2] 闫肃[1] 段嘉友[1] 李华[1] 杨建峰[1] 

机构地区：[1]中国科学院西安光学精密机械研究所,陕西西安710119 [2]中国科学院大学,北京100049

出　　处：《中国激光》2013年第4期251-256,共6页Chinese Journal of Lasers

基　　金：国家自然科学基金(40805013)资助课题

摘　　要：基于分体型萨格奈克干涉仪的基本原理,针对通光口径为60mm、光谱通道数为65的分体型萨格奈克干涉仪,模拟了干涉仪反射镜装配误差引起的干涉条纹变化情况,分析了装配误差对干涉条纹的影响,并根据设计指标推导了干涉仪系统装调的位置精度及角度精度要求。详细介绍了实现干涉仪精密装调的系统方案,其中包括装调主平面的建立、分光棱镜的精确定位以及干涉仪长臂反射镜、短臂反射镜的精密定位调整,整个装调方案基于自准直原理并通过巧妙的基准转换关系最终实现了干涉仪安装位置精度优于0.01mm、安装角度精度优于1″、系统主截面重合精度优于1″的高精度装配要求。A separated Sagnac interferometer with optical diameter of 60 mm and spectral channel of 65 is introduced based on its working principle. Ideal interference fringes and interference fringes are simulated when reflector has an angle deviation, and the effect of alignment error to the interference fringes is analyzed. The position accuracy and angle accuracy of alignment are induced based on the optical design parameters. The method of precision alignment is introduced in detail, which includes the installation of primary alignment plane, the precise location of splitting prism, the precise adjustment of long-arm and short-arm reflectors. Through the installation of alignment refrence and the masterly refrence transformation, the precise alignment of separated Sagnac interferometer is achieved based on the principle of auto-collimation, whose position accuracy is better than 0.01 ram, angle accuracy is better than 1＂, super possition accuracy of primary working plane is better than 1＂.

关 键 词：光学设计 精密装调 萨格奈克干涉仪 分体型 位置精度 角度精度 

分 类 号：TN205[电子电信—物理电子学]