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出 处:《Journal of Semiconductors》2000年第10期966-969,共4页半导体学报(英文版)
基 金:Project Supported by National Natural Science Foundation of China Under Grant No.696770 1 2 and Major State BasicResearch Deve
摘 要:A 1×8 GaAs/GaAlAs optical power splitter based on a MultiMode Interference (MMI) coupler is presented. The input and output single mode waveguides are optimized by the Discrete Spectral Index Method (DSIM) and a moderate square spot on the output in deep etched rib waveguides is obtained. The fabrication tolerance has been analyzed by the Finite Difference Beam Propagation Method (FDBPM). The device was fabricated by the dry etching technique and the near field output obtained. The device shows polarization insensitive, large fabrication tolerance, low theoretical excess loss and low power imbalance.A 1×8 GaAs/GaAlAs optical power splitter based on a MultiMode Interference (MMI) coupler is presented. The input and output single mode waveguides are optimized by the Discrete Spectral Index Method (DSIM) and a moderate square spot on the output in deep etched rib waveguides is obtained. The fabrication tolerance has been analyzed by the Finite Difference Beam Propagation Method (FDBPM). The device was fabricated by the dry etching technique and the near field output obtained. The device shows polarization insensitive, large fabrication tolerance, low theoretical excess loss and low power imbalance.
分 类 号:TN491[电子电信—微电子学与固体电子学]
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