用于真空测量的场发射阴极制备及研究进展  

THE FABRICATION AND RESEARCH PROGRESS OF FIELD EMISSION CATHODE FOR VACUUM MEASUREMENT

作　　者：李得天[1] 张虎忠[1] 冯焱[1] 成永军[1] 

机构地区：[1]兰州空间技术物理研究所真空低温技术与物理重点实验室,甘肃兰州730000

出　　处：《真空与低温》2013年第1期1-6,共6页Vacuum and Cryogenics

基　　金：国家杰出青年科学基金项目(61125101)资助

摘　　要：主要回顾了近半个世纪用于真空测量的多种场发射阴极,阐述其制备方法及应用现状,说明了各种阴极结构的特点,最后介绍了近几年场发射阴极制备研究的最新进展。新型场发射阴极,对于真空测量的未来发展具有重要的推动作用。The subject of this article is to review various field emission cathodes （ FEC ） used in vacuum measurement for nearly semicentury. The processing methods of FEC and application status are described mainly. Moreover, the structure characteristics of the corresponding cathodes are also illustrated. At last, the latest progress of research in FEC is introduced briefly. It is shown that the novel field emission cathodes have vast application prospect in the future, and which will promote the development in vacuum measurement greatly.

关 键 词：阴极 场发射 真空测量 电离规 

分 类 号：O462.4[理学—电子物理学]