三波长同轴输出皮秒激光精细加工系统的研制及其应用  

Investigation and Application of Coaxial Output Three-Wavelength Picosecond Laser Micro-Machining System

作　　者：刘洋[1,2] 余锦[1] 张雪[1] 貊泽强[1,2] 聂树真[1] 黄玉涛[1] 樊仲维[1,3] 陈波[4] 

机构地区：[1]中国科学院光电研究院,北京100094 [2]中国科学院大学,北京100049 [3]北京国科世纪激光技术有限公司,北京100192 [4]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《激光与光电子学进展》2013年第5期153-159,共7页Laser & Optoelectronics Progress

基　　金：中国科学院科研装备研制项目(Y2010008);国家863计划(2011AA030205)资助课题

摘　　要：为了满足不同材料的精细加工需求,采用三波长皮秒激光器作为光源,配合自行设计的光学系统和控制系统,研制了三波长同轴输出皮秒激光精细加工系统。该系统可使用任意一种、两种或三种激光波长进行同工作距加工,通过轴向色差补偿设计,实现轴向焦点补偿最大距离0.4mm,最小焦斑直径为3μm。初步探讨了该系统在微电子行业的应用,进行了铜电极板、手机屏的切割实验以及位置敏感阳极探测器图形的制作,实验证明该系统可满足多种材料的精细加工要求。In order to satisfy micro-machining requirements of different materials, a coaxial output three-wavelength picosecond laser micro-machining system is designed with three-wavelength picosecond laser, self-designed optics system and control system. This system can use any one, two or three of the laser wavelengths to process at the same working distance. Through the axial chromatic aberration compensation design, the maximum distance of axial focus compensation is 0. 4 mm, and the diameter of the minimum focal spot is 3 μm. With this system, the experiments of cutting copper electrode plates and mobile phone screen and fabricating graphics for position-sensitive anode detector have been carried out. Experiments show that the system can satisfy the micro-machining requirements of many materials.

关 键 词：激光技术 三波长激光器 皮秒激光 精细加工 

分 类 号：TN249[电子电信—物理电子学]