三极FED分段复合衬底电极的特性和制作  

Characteristics and Fabrication of the Segmented Recombination Substrate Electrode for Triode FEDs

作　　者：李玉魁[1] 李晓荃[1] 刘兴辉[2] 卢文科[3] 曾凡光[4] 

机构地区：[1]中原工学院电子信息学院,郑州450007 [2]辽宁大学物理学院,沈阳110036 [3]东华大学信息科学与技术学院,上海201620 [4]郑州航空工业管理学院数理系,郑州450015

出　　处：《微纳电子技术》2013年第5期322-326,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51072184;60976058);河南省教育厅自然科学研究计划资助项目(2009B510019)

摘　　要：结合丝网印刷技术、烘烤工艺和烧结工艺,采用印刷ZnO层和银浆层相结合的方案,进行了分段复合衬底电极的制作。该分段复合衬底电极能够降低无效的阴极电压降,增强三极场发射显示器的发光亮度并改善其发光均匀性,且制作成本低廉。分段复合衬底电极避免了过长过细衬底电极现象,促使碳纳米管提供更多电子,同时有效改善了碳纳米管的场发射均匀性。利用碳纳米管作为阴极材料,进行了三极场发射显示器的研制,并进行点阵图像显示,从而证实了这种分段复合衬底电极制作工艺的可行性。与普通银电极场发射显示器相比,分段复合衬底电极场发射显示器能够将开启场强从1.92 V/μm降低到1.81 V/μm,其最大场发射电流由1 332.5μA提高到2 137.8μA,具有典型的场致发射特性以及优良的图像发光均匀性。Combined with the screen-printing technique, baking process and sintering process, the segmented recombination substrate electrodes were fabricated together with the printed ZnO layer and solidified silver slurry layer. Based on the segmented recombination substrate elec- trodes, the valid voltage drop in the cathode is reduced, the luminous brightness of the triode field emission display （FED） is enhanced and the luminous brightness uniformity is improved. Furthermore, the fabrication cost is low. In addition, the much longer and thinner substrate elec- trode phenomenon was avoided, which would force the carbon nanotube to supply more electrons. The field emission uniformity of the carbon nanotube is also effectively enhanced. Using the carbon nanotube as the cathode material, the triode FED with the segmented recombinationsubstrate electrodes was developed, and the dot-matrix image was shown, which the feasibility of the segmented recombination substrate electrodes was confirmed. Compared with the FED with the common silver electrodes, the turn-on electric-field of the triode FED with the segmented re- combination substrate electrodes can reduce from 1.92 V//Lm to 1.81 V//~m and the maximum field emission current can enhance from 1 332.5 ~A to 2 137.8/IA. The FED with the segmented recombination substrate electrode has typical field emission characteristics and better image lumi- nous brightness uniformity.

关 键 词：衬底电极 丝网印刷 场发射显示器 阴极 银浆 

分 类 号：TB383[一般工业技术—材料科学与工程]