脉冲激光与电化学复合的应力刻蚀加工质量研究  

Analysis of stress-etching quality based on nanosecond pulse laser electrochemical machining

作　　者：张朝阳[1] 李中洋[1] 秦昌亮[1] 印洁[1] 张长桃[1] 毛卫平[1] 冯钦玉[1] 

机构地区：[1]江苏大学机械工程学院激光技术研究所,镇江212013

出　　处：《物理学报》2013年第9期204-210,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:50975127;51275218);江苏省自然科学研究基金(批准号:BK2011522)资助的课题~~

摘　　要：脉冲激光电化学复合加工可以有效去除激光辐照区域内的电解产物,提高加工效率,改善加工质量.针对高性能金属材料的微细加工要求,采用脉冲激光电化学复合的应力刻蚀加工方法对铝合金的刻蚀特性进行理论和试验研究.通过比较激光直接刻蚀加工和激光电化学复合加工的特点,应用扫描电子显微镜、光学轮廓仪等检测技术分析了刻蚀区域的形貌特征.根据力学电化学原理,探讨了金属材料微结构加工的应力去除机理.通过加工试验,研究了工艺参数和加工方式对加工质量的影响,采用优化的工艺参数,加工出了质量较好的微结构.试验结果表明,激光电化学复合的连续扫描加工稳定性好,可以有效地降低表面粗糙度,提高加工质量.Nanosecond pulse laser electrochemical etching can remove the electrolytic products of laser irradiated region and so improve the processing stability and processing efficiency. The stress-etching characteristics and the material removal mechanism for aluminum alloy workpiece were investigated theoretically and experimentally by the use of a laser electrochemical machining system. For comparison of processing topography between laser direct etching in air and laser electrochemical machining, the scanning electron microscopy and the optical profilometry were used to detect and analyze etching morphological characteristics of machining areas. Based on the principle of mechanics and electrochemistry, stress-etching principles of laser electrochemical machining were studied. In this study, the effects of processing parameters and machining method on machining quality were explored, and a complex mi- crostructure was processed successfully with reasonable processing parameters. The results show that laser electrochemical machining with better stability can reduce surface roughness and improve machining quality effectively.

关 键 词：激光电化学 应力刻蚀 加工质量 工艺参数 

分 类 号：TN249[电子电信—物理电子学]