微纳材料修饰的硅基微穿孔板共振降噪复合器件(英文)  

Hybrid Device for Noise Reduction with Micro-Nano Material and Silicon Micro-Perforated Panel Resonator

作　　者：吴少华[1] 赵湛[1] 赵俊娟[1,2] 孔德义[3] 郭丽君[1,2] 肖丽[1,2] 

机构地区：[1]中国科学院电子学研究所,传感技术国家重点实验室,北京100190 [2]中国科学院研究生院,北京100039 [3]中国科学院合肥智能机械研究所,传感技术国家重点实验室,合肥230031

出　　处：《纳米技术与精密工程》2013年第3期242-246,共5页Nanotechnology and Precision Engineering

基　　金：国家重点基础研究发展计划(973计划)资助项目(2011CB302104)~~

摘　　要：探索了一种通过MEMS技术制备硅基微穿孔板共振降噪结构,并进一步将ZnO微米纳米材料加入其中以提高吸声性能的新方法.采用MEMS技术在硅片上得到了孔径为100μm、一致性良好的微孔阵列,将其与刚性底座组合在一起,构成硅基微穿孔板降噪器件.将通过水热合成法得到的ZnO微米纳米材料制备在后底板硅片上,并与硅基微穿孔板组装在一起,构成微米纳米复合降噪器件.对上述两种器件进行降噪实验,结果显示采用MEMS精密加工技术能够获得吸声系数较高的共振降噪器件,而经过ZnO微米纳米材料修饰后的复合器件,其在1 500～6 000Hz频段内的平均吸声系数提高了2.54%,达到85.87%.这一现象在1 500～3 000 Hz频段尤为明显.因而,采用ZnO微米纳米材料修饰后的复合器件,吸声性能有所提升.A novel method was adopted for noise reduction, which added micro-nano ZnO structure into the micro-perforated panel （MPP） resonator. MEMS technology was employed to fabricate the well aligned micro perforators on the silicon panel, and the radius of the perforator was about 100 μm. The silicon panel and a rigid bracket constituted the MPP resonator. The micro-nano ZnO material synthesized by hydrothermal method was deposited onto the back panel in order to form a kind of hybrid device for noise reduction. Acoustic absorption experiments were carried out, and the results proved that the accura- cy fabrication by MEMS technology was able to form MPP resonator with good noise absorption, and ap- propriate micro-nano ZnO structures on back panel enhanced the noise absorption of the device. The av- erage absorption coefficient of the hybrid device increased by 2.54% , and reached 85.87% in the fre- quency band from 1 500 Hz to 6 000 Hz. The improvement was obvious especially in the frequency band from 1 500 Hz to 3 000 Hz. It can be concluded that the hybrid device with micro-nano ZnO structure and silicon MPP resonator had a better noise absorption capability.

关 键 词：ZnO微纳米结构 微穿孔板共振器 MEMS 降噪复合器件 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置]