高频光栅节距误差的采样云纹法分析  

Pitch Error Analysis of High-frequency Grating based on Sampling Moiré Method

作　　者：王竹林[1] 雷振坤[1] 赵燕茹[2] 

机构地区：[1]工业装备结构分析国家重点实验室大连理工大学工程力学系,大连116024 [2]内蒙古工业大学土木工程学院,呼和浩特010051

出　　处：《实验力学》2013年第2期158-165,共8页Journal of Experimental Mechanics

基　　金：国家自然科学基金(10972047;11172054;11062007);中央高校基本科研业务费(DUT11LK03)资助

摘　　要：使用采样云纹法来研究高频光栅节距的畸变程度。用电子束刻蚀的3922 line/mm的平行光栅,对其高分辨率扫描电镜图像进行采样和相移分析,得到对应的相位分布,进而转化为相对误差。对于正交光栅,分别进行水平和垂直方向线性滤波后转化为对应的平行光栅,进而得到相对误差分布,并提出误差统计分析来评价光栅质量。理论和实验验证表明采样云纹法可为高频光栅提供评价手段。Sampling Moiré method was adopted to study the pitch error of high-frequency grating with 3922 line/mm etched by electron beam.Sampling and phase-shift analysis were carried out for its high-resolution scanning electron microscopy images to obtain corresponding phase distribution.Then the relative pitch error for the grating was determined from the phase.For orthogonal grid,a linear filtering operation along horizontal and vertical directions was implemented respectively to obtain the corresponding parallel gratings.A confidence analysis was proposed to evaluate the grating quality.Simulation and experiment show that the sampling Moiré method can be used to evaluate the quality of high-frequency grating.

关 键 词：高频光栅 节距误差 采样云纹法 

分 类 号：O348.1[理学—固体力学] O438[理学—力学]