涂层结构对Ti-Al-N涂层氧化行为的影响  

Influence of Layer Structures on Oxidation Behavior of Ti-Al-N Coatings

作　　者：彭继华[1] 肖新生[1] 苏东艺 田君[3] 

机构地区：[1]华南理工大学材料科学与工程学院,广州510640 [2]广州今泰科技有限公司,广州510520 [3]东莞理工学院机械工程系,东莞523808

出　　处：《真空科学与技术学报》2013年第3期208-213,共6页Chinese Journal of Vacuum Science and Technology

基　　金：科技部中小创新基金项目(11C26214403099);广东省部产学研项目(2010B090400172)

摘　　要：采用多弧离子镀技术及TiAl合金靶,在SKH51高速钢基体上沉积了Ti1-xAlxN单层构型涂层和TiN/Ti1-xAlxN复合多层构型涂层,分析其高温氧化行为。用扫描电镜、X射线衍射、电子探针等手段表征了涂层氧化后的组织结构和元素分布。试验发现,基体Fe元素扩散到涂层表面意味着SKH51涂层试样剧烈氧化阶段的开始。当涂层的构型相同时,涂层的抗氧化性能随着涂层中铝含量增加而单调增加。但对于TiN/Ti0.33Al0.67N复合多层构型涂层,其抗氧化性则比Ti0.33Al0.67N单层构型涂层差,高于铝含量基本相同的Ti0.67Al0.33N单层构型涂层。空气中800℃恒温退火,TiN/Ti0.33Al0.67N涂层出现严重氧化的时间是43 h,Ti0.33Al0.67N、Ti0.67Al0.33N涂层分别为53 h和11 h。因此,Ti-Al-N涂层的抗氧化性不仅同涂层中铝含量有关,涂层构型也起着重要用。The single-layered Ti1-xAlxN coatings and multi-layered TiN/Ti1-xAlxN composite coatings were deposited by multi arc ion plating on substrates of SKH51 steel.The oxidation resistance of all coatings were evaluated.The microstructures and phase structures were characterized with X-ray diffraction,scanning electron microscopy,and electron probe micro analyzer.The results show that the Al content strongly affects the oxidation resistance of the coatings,and that the surface segregation of Fe was found to correlate with the initial stage of the severe oxidation of the coatings.For instance,in the contrast studies,as the Al content increased,the oxidation resistance monotonically increased.When it comes to oxidation resistance,the single-layered Ti0.33Al0.67N coating outperforms the multilayered TiN/Ti0.33Al0.67N coating.Annealed at 800℃,the severe oxidation times of TiN/Ti0.33Al0.67N,Ti0.33Al0.67N,and Ti0.67Al0.33N were found to be 43,53,and 11 h,respectively,indicating that the oxidation resistance depends not only on Al content but also on the layer structures.

关 键 词：涂层结构 多弧离子镀 Ti-Al-N涂层 微观结构 氧化行为 

分 类 号：TQ174[化学工程—陶瓷工业]