光学元件损伤在线检测图像处理技术  

Images progressing technology of optics damage online inspection

作　　者：冯博[1] 刘炳国[1] 陈凤东[1] 刘国栋[1] 彭志涛[2] 元浩宇[2] 孙和义[1] 

机构地区：[1]哈尔滨工业大学电气工程及自动化学院,哈尔滨150001 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2013年第7期1697-1700,共4页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(61275096)

摘　　要：针对光学元件损伤图像中损伤区域的高精度检测问题,对内全反射照明下光学元件损伤图像的处理技术进行了研究。根据在线检测图像中损伤区域中心峰值的信号强度高于局部背景的信号强度这一特点,利用高斯滤波器生成待检测图像的局部信号强度比图像,实现了对损伤区域的低漏检率自动定位;根据CCD的成像原理,利用辐射标定的方法建立起损伤区域的尺寸与其在图像中总灰度的关系方程,实现了损伤区域的亚像素高精度尺寸测量。实验结果表明,与传统的光学元件损伤图像处理算法相比,本文提出的算法在保持低漏检率的同时大大提高了损伤区域的测量精度。Images progressing technology of optics damage pictures which were taken in total internal rellectlon eage niuiiil- nation was studied in this paper. Signal intensity of defects is stronger than background＇s intensity in the edge lit images. Based on this property, local signal intensity ratio image was produced by Gaussian filter to locate the defects with high accuracy. A cali- bration equation between the size of the defects and the gray value was built. The size of the defects could be precisely calculated using the calibration equation. A comparison test was carried out, the results indicate that the proposed algorithm is superior to the traditional ones on the precision.

关 键 词：图像处理 局部信号强度比 辐射标定 全内反射照明 

分 类 号：TN247[电子电信—物理电子学]