全自动太阳能硅片清洗机的研制  

The Development and Research of Automatic Solar Wafers Cleaning Equipment

作　　者：孟超[1] 胡子卿[1] 常志[1] 时璇[1] 申璐青[1] 

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024

出　　处：《电子工业专用设备》2013年第5期16-18,45,共4页Equipment for Electronic Products Manufacturing

摘　　要：全自动太阳能硅片清洗机是对脱胶预清洗之后的硅片进行进一步的清洗。为了保证得到洁净的硅片,除了采用碱溶液清洗之外,清洗设备还增加了浸泡、超声清洗、抛动、鼓泡等清洗工艺,提高了硅片的清洗质量和可靠性,保证了硅片的清洗合格率。采用先进的自动控制系统,不仅能满足客户的现有工艺要求,还可以根据用户的需求进行不同的工艺配置。Automatic solar silicon wafer cleaning machine is for further cleaning silicon after be degumming pre-cleaned.In order to ensure to gen cleaned silicon,in addition to alkali solution cleaning,the equipment also increases immersion,ultrasonic cleaning,throwing bubbling cleaning process.The methods improve the quality and reliability of wafer cleaning,ensure the silicon cleaning pass rate.By Using of advanced automatic control system,the equipment not only meets the customer＇s existing process requirements,but also for the different process configurations according to the needs of users.

关 键 词：太阳能硅片 超声清洗 工艺配置 

分 类 号：TN305.97[电子电信—物理电子学]