金属类MEMS器件可靠性试验技术研究  

A Study on Reliability Test Technology of Metal MEMS Component

作　　者：刘加凯[1] 齐杏林[1] 冯建伟[2] 徐龙[3] 肖东[4] 

机构地区：[1]军械工程学院弹药工程系,河北石家庄050003 [2]武警工程大学装备工程学院,陕西西安710086 [3]78465部队,四川广元628000 [4]66440部队,河北石家庄050081

出　　处：《军械工程学院学报》2013年第2期35-38,共4页Journal of Ordnance Engineering College

摘　　要：针对金属类MEMS机构可靠性水平较低且没有标准化的可靠性试验方法的现状，提出将强化试验方法引入金属类MEMS机构的可靠性研究中．确定强化试验的内容为温度循环、随机振动和冲击试验，并分别设计试验剖面．选取MEMS惯性开关作为典型器件开展试验研究，试验结果表明，所设计的可靠性试验能够有效激发MEMS机构的潜在缺陷，温度应力易引起MEMS器件层间产生疲劳效应，而振动和冲击应力则易引发器件结构性损坏；环境应力对MEMS机构具有疲劳累积效应，经历较多试验类型的样本较经历较少试验类型的样本更容易失效；惯性开关的主要失效模式是分层和变形，这2种失效模式在金属类MEMS机构中具有代表性．Aiming at the situation of low reliability level of metal MEMS component and without standardized reliability test method, the reliability enhancement test has been put forward. The content of enhancement test has been defined as temperature cycling test, random vibration test, and impact test, and the test profile has been designed respectively. A certain inertia switch has been collected as the typical component to carry out the reliability test research. The test result indicates that the reliability tests include temperature; vibration and impact which can effectively bring about the potential defect of MEMS. The environmental stress can induce material fatigue cumulate, and the main failure modes of inertia switch are of delamination and deformation,which are the typical failure modes in metal MEMS component.

关 键 词：金属MEMS器件 可靠性试验 惯性开关 失效模式 

分 类 号：TN4[电子电信—微电子学与固体电子学]