氮气流量对ZrN/Zr薄膜色度特性的影响  

Effect of Nitrogen Flow on the Chromaticity Properties of ZrN/Zr Thin Films

作　　者：李新领[1,2] 周志男[3] 孙维连[1,2] 孙铂[1] 王会强[1,2] 安广[1] 

机构地区：[1]河北农业大学机电工程学院,保定071001 [2]河北省轻金属合金材料工程技术研究中心,保定071001 [3]河北农业大学现代教育技术中心,保定071001

出　　处：《表面技术》2013年第3期13-15,41,共4页Surface Technology

基　　金：河北省自然科学基金项目(E2009000646);河北农业大学社科基金和理工基金(LG20120101)

摘　　要：采用中频孪生靶磁控溅射技术,在不锈钢和铝基体上沉积出ZrN/Zr薄膜,表征了薄膜的厚度、色度及表面形貌,研究了氮气流量对ZrN/Zr薄膜的沉积速率和色度的影响。结果表明:随着氮气流量的增加,薄膜的沉积速率先降低,后升高,氮气流量在2.5×10-10～3.5×10-10m3/s范围内时对薄膜的沉积速率影响很小;随着氮气流量的变化,薄膜的颜色呈现规律性的变化,在氮气流量2.5×10-10～3.5×10-10m3/s范围内,可以制备出色彩亮丽的仿金薄膜ZrN,且膜层致密。The ZrN/Zr films were deposited on stainless steel and aluminum substrates by mid-frequency twin-targets magnetron sputtering technology.The thickness,chromaticity,and surface morphology of ZrN/Zr films were characterized.And the influences of nitrogen flow on deposition rate and chromaticity of ZrN/Zr films were studied.The results show that the deposition rate decreases first with the increase of nitrogen flow,then increases.Nitrogen flow between 2.5×10-10 and 3.5×10^-10 m^3/s,the influence of nitrogen flow on deposition rate is very small.With the increase of nitrogen flow,the color of the film changes regularly.In the range of 2.5×10-10~3.5×10^-10 m^3/s,the gold ZrN films are bright and density.

关 键 词：氮气流量 ZRN Zr薄膜 色度 沉积速率 中频孪生靶 

分 类 号：TG174.444[金属学及工艺—金属表面处理] O484.4[金属学及工艺—金属学]