基底对TiNxOy太阳能选择性吸收薄膜性能的影响  

The Effect of Substrate on the Performance of TiN_xO_y Solar Selective Absorbing Films

作　　者：杨娟[1] 范真[1,2] 袁宁一[3] 丁建宁[1,3] 

机构地区：[1]江苏大学微纳米研究中心,镇江212013 [2]江苏技术师范学院机械与汽车学院,常州213001 [3]常州大学低维材料微纳器件与系统中心,常州213164

出　　处：《表面技术》2013年第3期16-18,共3页Surface Technology

基　　金：江苏省太阳能电池材料与技术重点实验室开放课题(201103);江苏技术师范学院科研基金项目(KYY10058)

摘　　要：采用磁控溅射法,分别在铜基、铝基上制备AlN/TiNxOy/Al多层膜,对比了该膜系与铜基和铝基的粘附性能,分析了与基底粘附性能的差异原因。采用二次阳极氧化方法使铝基底表面形成多孔微结构,再次镀多层膜,表征了膜系的表面形貌、光谱吸收性能和反射率,研究了微结构对薄膜性能的影响。结果表明:薄膜与铝基的粘附性较好,基底表面形成多孔微结构能有效提高其光谱吸收率。The AlN/TiNxOy/Al multilayers were deposited on Al substrate and Cu substrate by magnetron sputtering technology and the adhesion properties between the multilayers and two kinds of substrates were investigated respectively and the reasons of different adhesion of substrates were analyzed.Porous structures were made on the Al substrate by a two-step anodization method,and then the multilayers were deposited,and the surface morphology,the optical properties and the reflectance of the multilayers were tested.Then the influence of microstructure on the performance of solar absorbing films was studied.The results showed that the adhesion properties between the multilayers and Al substrate were better and porous structures could improve the absorptance of the solar selective absorbing films.

关 键 词：TiNxOy薄膜 太阳能 光谱性能 粘附性 基底多孔结构 

分 类 号：TG174.444[金属学及工艺—金属表面处理] O484.4[金属学及工艺—金属学]