阳极氧化法制备TiO_2有序多孔薄膜  

Fabrication of Porous TiO_2 Films by Anodic Oxidation

作　　者：耿翀[1] 严清峰[1] 王晓青[1] 沈德忠[1] 

机构地区：[1]清华大学化学系,新型陶瓷与精细工艺国家重点实验室,北京100084

出　　处：《人工晶体学报》2013年第5期794-798,共5页Journal of Synthetic Crystals

基　　金：清华大学信息科学与技术国家实验室(筹)学科交叉基金;清华大学自主科研计划资助课题

摘　　要：采用二次阳极氧化工艺,以含有氟化铵和水的乙二醇体系作为电解液,在纯钛表面制备有序的TiO2多孔薄膜。通过改变预处理方式、电压、氧化时间和搅拌速度等实验参数来探究其对TiO2多孔薄膜形貌的影响。结果表明,抛光后Ti基片制得的TiO2多孔薄膜表面更加平整;TiO2纳米孔的孔径和孔间距随着阳极氧化电压升高在一定范围内线性增大;TiO2纳米孔的孔径随着阳极氧化时间延长增大,孔壁随时间延长减薄,通过控制氧化时间可以实现纳米孔薄膜向纳米管阵列的转变;搅拌速度在400 r/min时,能够获得有序的自组织TiO2多孔薄膜。TiO2 porous thin films with long-range periodic arrangement were prepared by two-step anodic oxidation.Glycol containing ammonium fluoride and water was used as electrolyte.The effects of several key experimental parameters,including pretreatment method,anodizing voltage,oxidation time and stirring speed,on the morphology of TiO2 porous film and nanotube arrays were investigated.It was found that the pore diameter and pore spacing increases linearly with increased anodization voltage in a certain range.Besides,the transformation from porous thin films to nanotube arrays was achieved by controlling the oxidation time.The stirring speed has a significant influence on the anodic oxidation results.

关 键 词：二氧化钛 阳极氧化法 多孔薄膜 纳米管阵列 

分 类 号：O484[理学—固体物理]