Precise simulation of surface acoustic wave devices using frequency-dependent coupling-of-modes parameters  

作　　者：WANG Hao WANG WeiBiao WU HaoDong SU Bo SHUI YongAn 

机构地区：[1]Key Laboratory of Modern Acoustics (MoE),Institute of Acoustics,Nanjing University [2]Nanjing Electronic Devices Institute [3]Jiangsu Engineering Research Center for Sensing Materials and Devices

出　　处：《Science China(Physics,Mechanics & Astronomy)》2013年第7期1263-1268,共6页中国科学：物理学、力学、天文学（英文版）

基　　金：supported by the National Natural Science Foundation of China(Grant Nos. 10774073 and 11174143)

摘　　要：Herein we extract all the frequency-dependent coupling-of-modes （COM） parameters, which will be used to the rapid simulation and optimal design of surface acoustic wave （SAW） devices. FEM/BEM is used to calculate the exact field distributions of forward and backward surface acoustic waves within a finite-length periodic grating at every frequency. The middle compo- nent of the grating, regarded as a periodic structure, is selected to be investigated which can satisfy the presupposition of the COM model. From these field distributions, the values of P-matrix elements of one cell are calculated. The COM parameters taken as functions of frequency are accurately obtained. Specifically, the frequency-dependent relationships of reflection coefficient and propagation velocity are obtained independently. Using the resultant COM parameters, a one-port resonator on the substrate of 128°YX-LiNbO3 is simulated and the admittance curve shows good agreement with the simulating results using FEM/BEM. These results verify the validity and accuracy of this method.Herein we extract all the frequency-dependent coupling-of-modes (COM) parameters, which will be used to the rapid simulation and optimal design of surface acoustic wave (SAW) devices. FEM/BEM is used to calculate the exact field distributions of forward and backward surface acoustic waves within a finite-length periodic grating at every frequency. The middle component of the grating, regarded as a periodic structure, is selected to be investigated which can satisfy the presupposition of the COM model. From these field distributions, the values of P-matrix elements of one cell are calculated. The COM parameters taken as functions of frequency are accurately obtained. Specifically, the frequency-dependent relationships of reflection coefficient and propagation velocity are obtained independently. Using the resultant COM parameters, a one-port resonator on the substrate of 128oYX-LiNbO 3 is simulated and the admittance curve shows good agreement with the simulating results using FEM/BEM. These results verify the validity and accuracy of this method.

关 键 词：surface acoustic wave devices coupling-of-modes model frequency-dependent parameters 

分 类 号：TN65[电子电信—电路与系统] TP316.7[自动化与计算机技术—计算机软件与理论]