功率器件IGBT槽栅设计尺寸对直流参数影响的研究  

作　　者：闻永祥 范伟宏[1] 顾悦吉 刘琛[1] 刘慧勇[1] 

机构地区：[1]杭州士兰集成电路有限公司技术中心,浙江杭州310018

出　　处：《中国集成电路》2013年第6期65-69,共5页China lntegrated Circuit

摘　　要：IGBT由于其优异特性而广泛应用于电机、电焊机和功率开关等领域,是功率器件的主流产品之一。本文首先简要介绍IGBT及历代器件工艺的发展,提出了一种槽栅IGBT的工艺流程,并研究了其槽栅设计尺寸对器件主要直流参数的影响。Power IGBTs are widely used due to its excellent characteristics in areas such motor drives, welding machines and switch power supplies. The development of IGBTs and the processing technologies are introduced briefly, then trench IGBT process flow is presented. The IGBT trench size is studied with its DC parameters.

关 键 词：绝缘栅晶体管 工艺 槽栅尺寸 直流参数 

分 类 号：TN322.8[电子电信—物理电子学]