基于纳米磁性液体的旋转式蠕动微泵  

Rotary Peristaltic Micro-Pump Based on the Nano-Magnetic Fluid

作　　者：吴健[1] 刘同冈[1] 张亮[1] 

机构地区：[1]中国矿业大学机电工程学院,江苏徐州221116

出　　处：《微纳电子技术》2013年第6期366-370,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(50802111);江苏省研究生培养创新工程项目(CXZZ12_0928)

摘　　要：设计了一种基于纳米磁性液体的旋转式蠕动微泵。泵体由上、下基板和弹性薄膜组成,弹性薄膜位于上、下基板的中间位置。在上、下基板上分别加工出微型管道,上管道中的纳米磁性液体在磁场作用下压迫弹性薄膜变形,从而推动下管道中的液体流动,并且采用环形结构,实现连续泵送的目的。运行结果显示:泵送流量和泵送压力是梯度磁场产生的正压力与移动磁场产生的驱动力共同作用的结果。当磁场旋转速度达到6 r/min时,微泵产生的最大泵送压力达1 600 Pa,此时的流量为1.8 mL/min。A rotary peristaltic micro-pump based on the nano-magnetic fluid was designed, which was composed of an upper substrate, a lower substrate and an elastic film positioned between the two substrates. A micro-channel was machined on each substrate, the magnetic fluid in the upper micro-channel was gathered by a permanent magnet to deform the elastic film in order to push the sample liquid in the lower micro-channel. Both micro-channels were designed with the ring struc- ture to pump the liquid continuously. The operational result indicates that the flow rate and out- put pressure are the combination result of the positive l^ressure generated by the gradient magne- tic field and the driving force produced by the moving magnetic field. When the rotational speed of the magnetic field is 6 r/min, the maximum output pressure and flow rate of the micro-pump are 1 600 Pa and 1.8 mL/min, respectively.

关 键 词：微机电系统(MEMS) 微流体系统 微泵 纳米磁性液体 微致动 

分 类 号：TH703[机械工程—仪器科学与技术] TB383[机械工程—精密仪器及机械]