Fabrication of Al/AlO_x/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process  

作　　者：吴玉林 邓辉 于海峰 薛光明 田野 李洁 陈莺飞 赵士平 郑东宁 

机构地区：[1]Beijing National Laboratory for Condensed Matter Physics,Institute of Physics,Chinese Academy of Sciences

出　　处：《Chinese Physics B》2013年第6期206-210,共5页中国物理B（英文版）

基　　金：supported by the Science Foundation of the Ministry of Science and Technology of China (Grant Nos. 2011CBA00106 and 2009CB929102);the National Natural Science Foundation of China (Grant Nos. 11104333,10974243,and 11161130519);the Knowledge Innovation Program of the Chinese Academy of Sciences

摘　　要：Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks： Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density （jc） and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits.Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks： Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density （jc） and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits.

关 键 词：Josephson junction Al/AlOx/Al superconducting qubit 

分 类 号：O413[理学—理论物理]