激光透射连接硅与玻璃熔池研究  

Investigation on Melt Pool in Transmission Laser Bonding of Silicon and Glass

作　　者：王霄[1] 薛国春[1] 李品[1] 蒋涛[1] 高阳阳[1] 陈浩[1] 黄创[1] 严长[1] 刘会霞[1] 

机构地区：[1]江苏大学机械工程学院,江苏镇江212013

出　　处：《中国激光》2013年第6期184-190,共7页Chinese Journal of Lasers

基　　金：国家自然科学基金(51275219);江苏省光子制造科学与技术重点实验室开放基金(GZ201105);江苏高校优势学科建设工程资助课题

摘　　要：使用Nd:YAG脉冲激光器对硅与玻璃进行激光透射连接实验,研究了工艺参数(功率、速度及离焦量)对熔池几何要素(熔深、熔宽及深宽比)的单因素及交互式影响,分析了激光能量密度对激光透射连接硅与玻璃熔池成形的影响,并量化了激光能量密度与熔池几何要素之间的关系。得到了深宽比与剪切强度的匹配曲线。结果表明,当激光能量密度大于8J/mm2时,深宽比趋于平稳,深宽比达到0.25时,其剪切强度达到最大值,激光能量密度对熔池成形及连接质量有着较为显著的作用。A study on transmission laser bonding of silicon and glass by Nd： YAG pulse laser is conducted. Independent and interactive effects of process parameters （power, speed and stand-off distance） on geometric elements of melt pool （melt pool depth, width, and depth/width ratio） are discussed. Based on this, effects of laser energy density on melt pool shaping for transmission laser bonding of silicon and glass are analyzed. And the relationships between energy density and geometric elements of melt pool are quantified. The matching curve of the melt pool depth/width ratio and lap-shear strength is obtained. The results indicate that the melt pool depth/width ratio stays steady when the laser energy density is more than 8 J/ram2 , and lap-shear strength achieves the maximum value when the melt pool depth/width ratio is 0.25. Effects of laser energy density on melt pool shaping and bonding quality are significant.

关 键 词：激光技术 激光透射连接 硅 玻璃 熔池 

分 类 号：TG456.7[金属学及工艺—焊接]