采用紫外光刻电铸技术的微型腔注塑成型  

Micro-Cavity Injection Molding Based on Ultraviolet Lithography Galvanoformung and Abformung Technology

作　　者：徐斌[1] 王敏杰[2] 于同敏[2] 赵丹阳[2] 

机构地区：[1]西南科技大学制造过程测试技术教育部重点实验室,四川绵阳621010 [2]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116024

出　　处：《高分子材料科学与工程》2013年第6期169-172,共4页Polymer Materials Science & Engineering

基　　金："十一五"国家科技支撑计划重点项目(2006BAF04B13);校博士基金(10zx7143);教育部制造过程测试技术重点实验室开放基金(12zxzk07)资助

摘　　要：针对复杂微型腔制作的难点,基于紫外光刻电铸(UV-LIGA)技术和掩膜腐蚀的方法加工了细胞皿微型腔。以聚丙烯(PP)进行单因素充模流动工艺试验,通过极差分析,研究了注射速率、模具温度、熔体温度、保压压力和保压时间对微制品成型质量的影响规律。注射速率对提高充填率起主要作用,模具温度和熔体温度是次要因素,而保压压力和保压时间相对其它因素对充填质量影响较差,但必须保持在一个较高的水平。在获取优化工艺参数后,获得合格的制品。因此基于UV-LIGA技术和掩膜腐蚀的方法制作复杂结构微型腔对于微注塑成型是可行的。The cell container micro cavity was fabricated with ultraviolet lithography galvanoformung and abformung （UV-LIGA） technology and mask etching method to resolve the difficulty of complex micro-cavity production. Using single factor test method, the molding process of polypropylene （PP） was carried out. The influence sequence of process parameters such as injection rate, mould temperature, melt temperature, holding pressure and time, was obtained by extremely poor analysis. The results show that injection rate is the decisive parameter for the filling rate of the micro cavity. Melt temperature and mold temperature are the secondary factors, injection pressure and packing pressure time are less important than the others, but higher injection pressure is necessary. The qualified product was acquired with optimized process parameters. Therefore it is feasible that the micro cavity is made by UV-LIGA technology and mask etching method.

关 键 词：微注塑成型 细胞皿 紫外光刻电铸 成型工艺 

分 类 号：TQ320.66[化学工程—合成树脂塑料工业]