Polarimetric interferometer for measuring nonlinearity error of heterodyne interferometric displacement system  

作　　者：许素安 Luc Chassagne Suat Topcu 陈乐 孙坚 严天宏 

机构地区：[1]College of Mechanical and Electrical Engineering,China Jiliang University [2]LISV,University of Versailles Saint-Quentin,Versailles Cedex,78035,France

出　　处：《Chinese Optics Letters》2013年第6期25-29,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China (Nos. 51105348and 51075377);the Scientific Research Foundation for the Returned Overseas Chinese Scholars,State Education Ministry

摘　　要：This letter presents a polarimetric interferometer （PI） that can measure the ellipsometric parameter θ with an accuracy of 0.01° leading to a potential accuracy of 17 pm. The PI is constructed and compared with a commercial heterodyne interferometer （HI）. Given its low nonlinearity, the PI is used to measure the residual nonlinearity of a heterodyne interferometric displacement system. A rotating half wave plate is used to compensate for a part of the nonlinearity error caused by the misalignment of the axis between input polarizing states and beamsplitter.This letter presents a polarimetric interferometer （PI） that can measure the ellipsometric parameter θ with an accuracy of 0.01° leading to a potential accuracy of 17 pm. The PI is constructed and compared with a commercial heterodyne interferometer （HI）. Given its low nonlinearity, the PI is used to measure the residual nonlinearity of a heterodyne interferometric displacement system. A rotating half wave plate is used to compensate for a part of the nonlinearity error caused by the misalignment of the axis between input polarizing states and beamsplitter.

关 键 词：HETERODYNING INTERFEROMETRY POLARIMETERS 

分 类 号：TH744.3[机械工程—光学工程] TP212[机械工程—仪器科学与技术]