烧结颈对WO_3基多孔膜灵敏度影响的研究  

Study on the Effect of Sintering Neck on Sensitivity for WO_3 Porous Film

作　　者：詹成勇[1] 杨黎[1] 谢长生[1] 

机构地区：[1]华中科技大学材料成形与模具技术国家重点实验室,武汉430074

出　　处：《材料导报》2013年第10期17-21,44,共6页Materials Reports

基　　金：国家自然科学基金(50927201);国家重点基础研究发展计划(2009CB939705;2009CB939702)

摘　　要：利用丝网印刷工艺在印有金电极的陶瓷基片上负载WO3多孔厚膜,再在500℃、600℃、700℃、800℃下烧结制成气敏器件,测试了其在甲苯中的伏安曲线和气敏响应特性。由SEM统计分析了4种厚膜的烧结颈信息,并通过导电模型结合I-V曲线拟合得到耗尽层宽度。依据烧结颈宽度和2倍耗尽层宽度的差值将烧结颈分成3类:宽颈、窄颈和闭颈,比较了三者对灵敏度的贡献。实验结果表明,不同类型的烧结颈含量直接影响材料的灵敏度,烧结颈含量越高的材料,其灵敏度越高。其中,有开关效应的窄颈对材料灵敏度贡献最大。The sensors were obtained by applying different sintering temperatures, 500 ℃, 600 ℃, 700 ℃, 800 ℃ on WOa porous films printed by screen printing onto the Au parallel electrode which was preprinted on the alu- mina substrate. Their sensing properties to toluene atmosphere and I-V characteristics were tested, respectively. The neck width and neck density were counted through SEM photographs of the films. The width of depletion layer was calculated by fitting the conduction model in the measured I-V data. Necks were classified into three types, broad neck, narrow neck and closed neck, according to the difference in width between depletion layer and neck. Their con- tributions to sensitivity were analyzed, respeqtively. The results indicate that the sensitivity was directly influenced by the contents of different necks. The material within more necks occupied higher sensitivity. Among them, the narrow neck acting as switching role contributed to the sensitivity considerably.

关 键 词：WO3 气体传感器 灵敏度 烧结颈 导电模型 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]