采用虚拟复合光栅的突变形面轮廓测量技术  

Profilometry of sudden surface changes with virtual compound grating

作　　者：许庆红[1] 钟约先[1] 由志福[1] 

机构地区：[1]清华大学机械工程系,北京100084

出　　处：《清华大学学报（自然科学版）》2000年第8期1-3,共3页Journal of Tsinghua University(Science and Technology)

摘　　要：为准确测量物体的突变形面 ,通常采用一种双频变精度方法。针对该方法的两次测量问题 ,提出了基于虚拟复合光栅投影的三维轮廓测量技术。用软件在计算机上生成虚拟光栅 ,将两种频率的光栅合成为投影复合光栅进行测量。该方法获得的栅线质量高 ,光栅频率容易改变 ,只需一次就能得到传统方法两次测量的变精度结果 ,加快了测量速度 ,提高了应用水平。应用此技术进行模拟和实例测量 。A dual frequency measurement method with variable precision was used to measure object shapes with sudden surface changes. The profilometry was based on projecting a virtual compound grating on the object. The virtual grating was computer generated, so the grating was very fine and the frequency was easily changed. The same results were obtained with one measurement with the new method instead of two measurements with different precisions. The method reduces measurement time and improves applicability. Satisfactory results were obtained in simulated and experimental measurements with the technique.

关 键 词：三维轮廓测量 投影栅相位法 光栅 频谱 

分 类 号：TB92[一般工业技术—计量学] TH741[机械工程—测试计量技术及仪器]