用溶胶-凝胶法制备SrTiO_3纳米薄膜材料  

Preparation of nano crystalline SrTiO_3 films with Sol-Gel process

作　　者：张志勇[1] 王雪文[2] 赵武[2] 周水仙[2] 张红[3] 

机构地区：[1]西安理工大学电子工程系,陕西西安710048 [2]西北大学电子科学系,陕西西安710069 [3]西北大学化学系,陕西西安710069

出　　处：《西北大学学报（自然科学版）》2000年第5期400-402,405,共4页Journal of Northwest University（Natural Science Edition）

基　　金：陕西省教委重点科研基金资助项目!(EE9301)

摘　　要：为制备具有电容和压敏特性的 Sr Ti O3双功能器件 ,以 Sr(NO3) 2 ,Ti(OC4 H9) 4为原料 ,用溶胶 -凝胶方法制备 Sr Ti O3材料 ,研究了水和醋酸等对 Sr Ti O3材料的影响机理 ,并对其进行 X-射线衍射、红外光谱和 TEM分析 ,证明该薄膜为纳米晶体结构 ,晶粒尺寸为 1 2～ 2 5nm。Nano crystalline SrTiO 3 films were synthesized with Sr(NO 3) 2 and (C 4H 9O) 4 Ti materials by the Sol Gel process.The crystallinity and purity of the films were studied with X ray diffraction spectrometer.The size and the distribution of SrTiO 3 grains were tested by transmission electron microscope(TEM). The effects of CH 3COOH concentration and water concentration on the qualities of SrTiO 3 films were studied,the proper process preparing films was optimized.

关 键 词：溶胶--凝胶法 SRTIO3薄膜 纳米晶体 

分 类 号：TB383[一般工业技术—材料科学与工程]