Fabrication of titanium oxide films at low temperature from aqueous solution  

低温条件下在水溶液中制备二氧化钛薄膜(英文)

作　　者：牟文宁[1] 翟玉春[2] 石双志[3] 

机构地区：[1]东北大学(秦皇岛分校)资源与材料学院,秦皇岛066004 [2]东北大学冶金物理化学研究所,沈阳110819 [3]秦皇岛首钢板材有限公司,秦皇岛066003

出　　处：《Transactions of Nonferrous Metals Society of China》2013年第5期1390-1394,共5页中国有色金属学报（英文版）

基　　金：Projects(51204036,51234009)supported by the National Natural Science Foundation of China;Project(20110042120014)supported by the Research Fund for the Doctoral Program of Higher Education,China

摘　　要：Titanium oxide thin films were prepared on self-assembled monolayers-coated silicon substrate using layer-by-layer self-assembly method and chemical bath deposition from an aqueous solution. The effects of temperature on structural properties, thickness and morphologies of titanium oxide thin films were investigated. The results show that the absorption peak of peroxo complexes of titanium at 410 nm decreases gradually with increasing the temperature. The deposited films consisting of titanium oxide nanocrystals are believed to be fully amorphous by XRD. Titanium oxide thin films fabricated at 60 °C for 2 h are continuous, dense and homogeneous with a size in the range of 20-40 nm by SEM. The chemical compositions of deposited thin films were studied by EDS, and the mole ratio of O to Ti is 2.2：1.利用化学浴沉积和层层自组装方法,在含有自组装涂层硅衬底上制备二氧化钛薄膜。研究温度对二氧化钛薄膜结构、厚度和微观形貌的影响。紫外可见光谱结果表明,钛过氧配合物在410nm处的吸收峰强度随着温度的升高而逐渐减小。由XRD分析结果可知,沉积的纳米二氧化钛薄膜为无定形层。SEM分析结果表明,在温度60°C、时间2h时可制得连续、致密、均一的二氧化钛薄膜,粒度分布为20~40nm间。EDS分析表明薄膜的化学组成为O和Ti,两者的摩尔比为2.2：1。

关 键 词：titanium oxide thin film chemical bath deposition self-assembly method 

分 类 号：TB43[一般工业技术]