微机械压力传感器结构稳健优化与实验研究  

Structural robust optimization and experimental study of a MEMS pressure sensor

作　　者：薄纪康[1] 

机构地区：[1]宁波职业技术学院工程训练中心,浙江宁波315800

出　　处：《机械设计》2013年第6期68-72,共5页Journal of Machine Design

基　　金：浙江省高职(高专)专业带头人培养计划资助项目

摘　　要：以一种液压用微机械压力传感器为研究对象,在分析其结构和工作原理基础上,提出了固有频率对加工误差的灵敏度分析方法,得到了对微机械压力传感器固有频率影响较大的尺寸参数,为后续优化和实际加工提供了可控参考。为提高微机械压力传感器的加工稳定性和性能指标,进行了微机械压力传感器结构稳健优化设计,推导了稳健性能约束条件,提出了设计变量、目标函数、尺寸约束条件和模态性能约束条件,建立了微机械压力传感器结构稳健优化的数学模型。稳健优化结果表明,微机械压力传感器的加工稳定性和灵敏度都有了较大提高。进行了实际加工和测试,测试结果表明稳健优化后的微机械压力传感器具有较高的灵敏度。Focusing on a MEMS （Micro Electro Mechanical System） pressure sensor for hydraulic application, a sensitivity a- nalysis method of natural frequency to fabrication error is proposed based on the characteristics of the structure and working principle of the MEMS pressure sensor. The key structural parameters influencing the natural frequency of the MEMS pressure sensor is obtained, which provides a reference for the subsequent optimization and actual fabrication. To promote the processing stability and performance, a robust optimization of the MEMS pressure sensor is presented. The robust constraint is derived, and the design variables, objective function, structural constraint, and mode constraint are proposed. The mathematical model of the robust optimization is built. The results of robust optimization and tests show that both the processing stability and sensitivity are enhanced. The MEMS pressure sensor is fabricated and tested. The test results show that the optimized MEMS pressure sensor has a better sensitivity performance.

关 键 词：液压系统 微机械压力传感器 加工误差 稳健优化 

分 类 号：TH812[机械工程—仪器科学与技术] TH122[机械工程—精密仪器及机械]