四象限光电探测器高温输出自激失效分析  

Failure Analysis of Output Self-Excitation of Four-Quadrant Photoelectric Detector at High Temperature

作　　者：何凌空[1,2] 高勇[1] 

机构地区：[1]西安理工大学自动化与信息工程学院,陕西西安710048 [2]西光集团军代室,陕西西安710043

出　　处：《西安理工大学学报》2013年第2期192-196,共5页Journal of Xi'an University of Technology

基　　金：陕西省教育厅专项科研计划资助项目(2013JK1111)

摘　　要：针对某型激光导引头所用的四象限光电探测器高温环境试验过程中出现的输出自激失效现象,确定了失效物理模型和失效模式,搭建了失效现象复现测试电路,通过半破坏性开封、光学镜检和波谱分析,提出探测器光敏面沟阻隔离区在工艺过程受离子污染,使沟阻隔离区反型是导致四象限光电探测器输出自激的根本原因。根据光电探测器光敏面隔离区表面反型产生输出自激的失效机理,针对电极膜真空蒸镀工艺引入有害离子的具体原因,对电极膜制作工艺路线进行了改进。经生产实践证明,改进后的工艺方法可有效消除该类失效模式的产生。With an aim at the failure phenomenon of the output self-excitation appearing in the high-tem- perature test of four-quadrant photoelectric detector used in a certain type of laser missile guidance, the failure physical model and failure mechanism are determined. The failure phenomenon simulation testing electric circuit is set up. Also, this paper suggests that the quarantine area of photosensitive surfaces of the detector is subject to ion contamination in the manufacturing process via the semi-destructive disclo- sure, microscopic examination and spectroscopic analysis, thus, resulting in quarantine area inversion, which is the basic cause to lead to the output self-excitation of four-quadrant photoelectric detector. Based on the output self-excitation failure mechanism produced by the photosensitive surfaces quarantine area surface inversion of photoelectric detector and with an aim at the concrete causes to introduce the harmful ions by the vacuum coating process, the electrode coating manufacturing technological line has been im- proved. The practical production tests indicate that the improved manufacturing method of technology has effectively eliminated the generation of failure modes of the types.

关 键 词：四象限探测器 输出自激 反型 失效分析 

分 类 号：TH765.2[机械工程—仪器科学与技术] TG502[机械工程—精密仪器及机械]