光栅铝膜纳米压痕尺寸效应分析  

The Size Effect Analysis of Nano-indentation of Grating Aluminum Film

作　　者：石广丰[1] 刘哲[1] 史国权[1] 徐志伟[1] 蔡洪彬[1] 

机构地区：[1]长春理工大学机电工程学院,长春130022

出　　处：《长春理工大学学报（自然科学版）》2013年第1期70-73,69,共5页Journal of Changchun University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金资助项目(51075042);吉林省科技发展计划项目(20080534);长春理工大学科技创新基金项目(2021000422);长春理工大学青年科学基金项目

摘　　要：研究光栅铝膜尺寸效应对于指导衍射光栅机械刻划工艺十分重要,对现有光栅铝膜进行了纳米压痕实验,从实验中获得光栅铝膜材料的力学性能参数。通过实验数据可知,光栅铝膜材料在微米级范围内存在明显的尺寸效应。利用三种尺寸效应模型Meyer模型、PSR模型及MPSR模型对光栅铝膜材料尺寸效应进行描述并分析,说明了几种模型在不同压深情况下的有效性。The research on the size effect of grating aluminum film is very important for the guidance of the mechanical ruling of diffraction grating. Some nano-indentation tests of the existing grating aluminum film are done, from which the mechanic parameters of the grating aluminum film are obtained, the Experiment data, indicate that there is obvious size effect in the micron range of the grating aluminum film depth. We use three kinds of size effect models-Meyer model, PSR model and MPSR model to describe and analyze the size effect of the grating aluminum film, describe and illustrate the validity of the three models in different indentation depths.

关 键 词：光栅铝膜 纳米压痕 尺寸效应 

分 类 号：TH164[机械工程—机械制造及自动化]