Temperature sensor based on polymer thin film optical waveguide  

有机聚合物薄膜波导温度传感器(英文)

作　　者：王龙德[1,2,3,4] 张彤[1,3,4] 张晓阳[1,3,4] 李若舟[1,3] 汪鲁宁[1] 

机构地区：[1]东南大学电子科学与工程学院,南京210096 [2]淮南师范学院化学与化工系,淮南232001 [3]教育部微惯性仪器及先进导航技术重点实验室,南京210096 [4]东南大学苏州研究院苏州市金属纳米光电技术重点实验室,苏州215123

出　　处：《Journal of Southeast University(English Edition)》2013年第2期152-157,共6页东南大学学报（英文版）

基　　金：The National Natural Science Foundation of China(No.60977038);the Specialized Research Fund for the Doctoral Program of Higher Education(No.20110092110016);the National Basic Research Program of China(973Program)(No.2011CB302004);the Foundation of Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education of China(No.201204)

摘　　要：Based on attenuated total reflection （ATR） and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric （TE） mode. To improve the sensitivity of the temperature sensor, the sensor＇s working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated.基于棱镜耦合衰减全反射和波导材料热光效应,利用聚合物薄膜平板波导作为温度传感器,论证了影响温度传感器灵敏度的各种因素.结合理论分析及实验验证,温度传感器灵敏度不仅与平板波导上包层及芯层厚度、聚合物材料光学损耗有关,而且与波导的导波模式阶数有关.结果表明,反映温度传感器反射率与温度关系灵敏度的斜率在反射率为零的某阶TE模式下,其值最高.因此,为提高传感器的灵敏度,传感器的入射光外角应选择在反射率为零的某阶TE模式下工作.该聚合物薄膜波导温度传感器具有灵敏度高、结构简单及易制作等特点.

关 键 词：temperature sensor planar optical waveguide guided wave mode thermo-optic effect prism coupling 

分 类 号：O431.1[机械工程—光学工程]