Scheduling method for single-arm cluster tools of wafer fabrications with residency and continuous reentrancy  

带驻留与连续重入的单臂集束型晶圆制造设备调度方法(英文)

作　　者：周炳海[1] 王翥[1] 陈佳[1] 

机构地区：[1]同济大学机械与能源工程学院,上海201804

出　　处：《Journal of Southeast University(English Edition)》2013年第2期187-193,共7页东南大学学报（英文版）

基　　金：The National Natural Science Foundation of China(No.71071115,61273035)

摘　　要：In order to enhance the utilization of single-ann cluster tools and optimize the scheduling problems of dynamic reaching wafers with residency time and continuous reentrancy constraints, a structural heuristic scheduling algorithm is presented. A nonlinear programming scheduling model is built on the basis of bounding the scheduling problem domain. A feasible path search scheduling method of single-arm robotic operations is put forward with the objective of minimal makespan. Finally, simulation experiments are designed to analyze the scheduling algorithms. Results indicate that the proposed algorithm is feasible and valid to solve the scheduling problems of multiple wafer types and single-ann clusters with the conflicts and deadlocks generated by residency time and continuous reentrancy constraints.为了提升单臂集束型设备的利用率,优化动态到达晶圆驻留与连续重入的调度问题,提出了一种结构式启发式调度算法.在界定调度问题域的基础上,建立了非线性规划的调度模型,并以动态到达晶圆的最短完工时间为调度目标,构造了基于搜索可行机械手搬运路径的调度算法.最后,设计了仿真实验,并对调度算法进行了实验分析.结果表明,所提出的算法对于解决多种晶圆类型的调度问题以及单臂集束型晶圆制造设备在加工过程中由于驻留约束限制和连续重入而产生的冲突和死锁的问题是可行而有效的.

关 键 词：cluster tools SCHEDULING residency time continuous reentrancy 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]