Influences of Bias Voltage and Target Current on Structure,Microhardness and Friction Coefficient of Multilayered TiAlN/CrN Coatings Synthesized by Cathodic Arc Plasma Deposition  

作　　者：阴明利 田灿鑫 王泽松 付德君 

机构地区：[1]College of Science,Xi'an Technological University [2]School of Physical Science and Technology and Key Laboratory of Artificial Nano-and Micro-materials of Ministry of Education,Wuhan University

出　　处：《Plasma Science and Technology》2013年第6期582-585,共4页等离子体科学和技术（英文版）

基　　金：supported by the Ministry of Industry and Information Technology of China(No.2009ZX04012-32);the International Cooperation Program of Ministry of Science and Technology of China(No.2011DFR50580)

摘　　要：Multilayered TiAlN/CrN coatings have been synthesized on stainless steel substrates by cathodic arc plasma deposition using TiAl and Cr targets.Influences of the bias voltage,cathode current ratio ITiAl/ICr,and deposition pressure on the hardness and friction coefficient of the coatings were investigated.The measurement revealed existence of two cubic phases,face-centercubic （Cr,Al）N and（Ti,Al）N,in the coatings deposited under various bias voltages except for the coating deposited at -400 V,which is amorphous.The hardness of the coatings was strongly dependent on the Itial/Icr ratio and deposition pressure,and reached a maximum of 33 GPa at an ITiAI/ICr ratio of 1.0 and a pressure of 1.0 Pa.The incorporation of the element chromium can reduce the density of pinholes in the coatings and assist the optimization of deposition conditions for high quality TiAlN/CrN coatings.Multilayered TiAlN/CrN coatings have been synthesized on stainless steel substrates by cathodic arc plasma deposition using TiAl and Cr targets.Influences of the bias voltage,cathode current ratio ITiAl/ICr,and deposition pressure on the hardness and friction coefficient of the coatings were investigated.The measurement revealed existence of two cubic phases,face-centercubic （Cr,Al）N and（Ti,Al）N,in the coatings deposited under various bias voltages except for the coating deposited at -400 V,which is amorphous.The hardness of the coatings was strongly dependent on the Itial/Icr ratio and deposition pressure,and reached a maximum of 33 GPa at an ITiAI/ICr ratio of 1.0 and a pressure of 1.0 Pa.The incorporation of the element chromium can reduce the density of pinholes in the coatings and assist the optimization of deposition conditions for high quality TiAlN/CrN coatings.

关 键 词：TiAlN/CrN cathodic arc plasma hardness friction coefficient 

分 类 号：TG174.44[金属学及工艺—金属表面处理]