Experimental demonstrations of high-Q superconducting coplanar waveguide resonators  

作　　者：LI HaiJie WANG YiWen WEI LianFu ZHOU PinJia WEI Qiang CAO ChunHai FANG YuRong YU Yang WU PeiHeng 

机构地区：[1]Quantum Optoelectronics Laboratory, Southwest Jiaotong University [2]State Key Laboratory of Optoelectronic Materials and Technologies,School of Physics and Engineering, Sun Yat-sen University [3]Research Institute of Superconductor Electronics, Nanjing University

出　　处：《Chinese Science Bulletin》2013年第20期2413-2417,共5页

基　　金：supported by the National Natural Science Foundation of China (90921010, 11174373);National Basic Research Program of China (2010CB923104)

摘　　要：We successfully designed and fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line (one end is short to the ground and another end is capacitively coupled to a through feedline). With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature. The obtained loaded quality factors are significantly high, i.e. up to ～10 6 . When the temperature increases slowly from the base temperature (20 mK), the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of device can integrate a series of CPW resonators with a common feedline, making it a promising candidate as the data bus for coupling distant solid-state qubits and the sensitive detector of single photons.We successfully designed and fabricated an absorption-type of superconducting coplanar waveguide （CPW） resonators. The resonators are made from a niobium film （about 160 nm thick） on a high-resistance Si substrate, and each resonator is fabricated as a meandered quarter-wavelength transmission line （one end is short to the ground and another end is capacitively coupled to a through feedline）. With a vector network analyzer we measured the transmissions of the applied microwave through the resonators at ultra-low temperature. The obtained loaded quality factors are significantly high, i.e. up to -106. When the temperature increases slowly from the base temperature （20 mK）, the resonance frequencies of the resonators are blue shifted and the quality factors are lowered slightly. In principle, this type of device can integrate a series of CPW resonators with a common feedline, making it a promising candidate as the data bus for coupling distant solid-state qubits and the sensitive detector of single photons.

关 键 词：共面波导 谐振器 实验演示 超导 高Q值 矢量网络分析仪 单光子探测器 质量因素 

分 类 号：TN751.2[电子电信—电路与系统]