ZrO_2-SiO_2薄膜对离子交换增强玻璃的光学和力学性能影响(英文)  

Mechanical and Optical Properties of Ion-exchange Strengthened Glass Coated with Sol-Gel Derived ZrO_2-SiO_2 Film

作　　者：张鹤[1] 周珏辉[1] 张启龙[1] 杨辉[1] 

机构地区：[1]浙江大学材料科学与工程学系,杭州310027

出　　处：《无机材料学报》2013年第7期785-789,共5页Journal of Inorganic Materials

基　　金：National Key Technology Support Program(2009BAG12A07);Zhejiang Province Innovation Group Program(2011R09010)

摘　　要：采用溶胶-凝胶法在玻璃表面制备出ZrO2-SiO2薄膜,然后通过离子交换形成镀膜增强玻璃,研究了薄膜组成对离子交换增强玻璃的力学和光学性能的影响。利用紫外可见分光光度计、激光椭偏仪、纳米压痕、三点抗弯和能谱（EDX）分析了薄膜结构及性能。结果表明：所有薄膜均连续均匀,纯ZrO2薄膜为四方相结构,含Si薄膜为无定形结构;薄膜具有较高弹性恢复率（≥60%）以及H/E比（≥0.1）,有利于强度增强;随Si含量增加,可见光透过率增大,但表面硬度和杨氏模量随之降低;0.5ZrO2-0.5SiO2薄膜综合性能最佳：表面硬度为18 GPa,抗弯强度为393 MPa,厚度~45 nm时可见光透过率大于85%。ZrO2-SiO2 films of different SiO2 content were deposited on soda-lime glass substrates through a Sol-Gel process,which was followed by an ion-exchange strengthening process.Phase presents,surface morphology and ion-exchange depth were determined by X-ray diffractometer,scanning electron microscope and energy dispersive spectrometer analysis,respectively.The mechanical and optical properties of coated glass were studied.Homogeneous,continuous and dense films are obtained.Pure ZrO 2 film belongs to tetragonal structure,while other films with SiO2 have an amorphous structure.ZrO2-SiO2 films with high ratio（H/E≥0.1） and elastic recovery（We≥60%） were thought to be favourable bending strength.Light transmittance increased,while hardness and Young’s modulus decreased with the increasing SiO2 content in films.Typically,chemical strengthened 0.5ZrO2-0.5SiO2 film coated glass exhibited high bending strength of 393 MPa and high hardness of 18 GPa,and a negligible optical loss in visible region for thin thickness（-45 nm）.

关 键 词：离子交换玻璃 ZrO2-SiO2薄膜 溶胶-凝胶 纳米压痕 

分 类 号：TQ174[化学工程—陶瓷工业]