基于TMS320F2812的二维PSD信号处理系统的设计  

Design of Two-dimensional PSD Signal Processing System Based on TMS320F2812

作　　者：史狄[1] 孙利群[1] 章恩耀[1] 

机构地区：[1]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《仪表技术与传感器》2013年第4期35-36,40,共3页Instrument Technique and Sensor

摘　　要：基于数字信号处理器(DSP)TMS320F2812,设计了二维PSD信号采集与处理系统。该系统采用了TMS320F2812作为主控芯片,实现了对PSD输出信号进行I/V转换放大,A/D转换与软件校正和DSP内的数据采集和计算,消除了模拟运算器件带来的干扰信号。通过实验数据验证,该系统在X、Y轴方向上±1 mm范围内的测量精度达到了0.01 mm.The two-dimensional PSD signal acquisition and processing system used in digital signal processing TMS320F2812 was designed.TMS320F2812 was used as the main chip in the system,which realized I/V conversion enhancement of PSD output signal,A/D conversion and software calibration,and the function of DSP data acquisition and calculation.The influence of interference signal brought by analog devices was eliminated.The accuracy of 0.01 mm was achieved in ±1 mm range on X、Y directions,which was proved by experiment data.

关 键 词：位置敏感探测器 TMS320F2812 坐标测量 A D软件校正 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]