Effect of Fe-doping on the structural and optical properties of ZnO thin films prepared by spray pyrolysis  

作　　者：S.M.Salaken E.Farzana J.Podder 

机构地区：[1]Department of Electrical and Electronic Engineering,Bangladesh University of Engineering and Technology,Dhaka-1000,Bangladesh [2]Department of Physics,Bangladesh University of Engineering and Technology,Dhaka-1000,Bangladesh

出　　处：《Journal of Semiconductors》2013年第7期31-36,共6页半导体学报（英文版）

摘　　要：Fe-doped ZnO thin films have been prepared by spray pyrolysis on glass substrates and the influence of Fe-doping concentration on the structural and optical properties of the films has been studied.The X-ray diffraction （XRD） analysis shows that Fe doping has a significant effect on crystalline quality,grain size and strain in the thin films.The best crystalline structure is obtained for 3 at%Fe doping as observed from scanning electron microscopy （SEM） and XRD.However,lower or higher Fe-doping degrades the crystalline quality in turn.Moreover,UV spectroscopy demonstrates the influence of Fe-incorporation on visible range transmittance of ZnO where the best transmittance is obtained for 3 at%doping.The results have been illustrated simultaneously focusing previous results obtained from literature.Fe-doped ZnO thin films have been prepared by spray pyrolysis on glass substrates and the influence of Fe-doping concentration on the structural and optical properties of the films has been studied.The X-ray diffraction （XRD） analysis shows that Fe doping has a significant effect on crystalline quality,grain size and strain in the thin films.The best crystalline structure is obtained for 3 at%Fe doping as observed from scanning electron microscopy （SEM） and XRD.However,lower or higher Fe-doping degrades the crystalline quality in turn.Moreover,UV spectroscopy demonstrates the influence of Fe-incorporation on visible range transmittance of ZnO where the best transmittance is obtained for 3 at%doping.The results have been illustrated simultaneously focusing previous results obtained from literature.

关 键 词：ZNO spray pyrolysis thin films 

分 类 号：TN304.21[电子电信—物理电子学] TN104.3