一种新的ESD防护器件的多脉冲TLP仿真方法  

A Novel Multi-Pulse TLP Simulation for ESD Protection Device

作　　者：丁扣宝[1] 黄大海[1] 

机构地区：[1]浙江大学微电子与光电子研究所,浙江杭州310027

出　　处：《电子学报》2013年第5期1016-1018,共3页Acta Electronica Sinica

基　　金：国家自然科学基金(No.61274035)

摘　　要：提出了一种新的集成电路ESD防护器件的TLP仿真方法,该方法类似于实际的TLP测量过程,在器件结构上施加一系列电流脉冲,获得相应的电压-时间曲线。分别截取每个电流脉冲及其电压响应70%～90%部分的平均值,取得的每一对电压和电流平均值作为I-V曲线上的一点,从而得到电流-电压特性曲线。在此基础上,不仅可得到触发电压Vt1和维持电压Vh,而且可以获取二次击穿电流It2。对LSCR的仿真结果表明仿真结果与测试结果符合的很好。A novel TLP simulation method for ESD protection device in integrated circuit is proposed,which is similar with the real TLP process.By imposing series of current pulses on the device structure,the corresponding voltage vs.time curves are obtained.The average current value in the range of 70%~90% time for each I-t curve is calculated,and so is the average voltage value,and hence the simulated I-V curve can be obtained,from which not only the trigger voltage and the holding voltage,but also the second breakdown current can be evaluated.The simulation results for LSCR fit well with the test one,from which the validity of this method can be verified.

关 键 词：静电放电 仿真 多脉冲 

分 类 号：TN302[电子电信—物理电子学]