基于光纤干涉投影的傅里叶变换轮廓术应用研究  

Applied Research on Fiber-Optic Interferometer Projection of Fourier Transform Profilometry

作　　者：朱荣刚[1] 朱日宏[1] 宋倩[1] 李建欣[1] 李金鹏[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《中国激光》2013年第7期166-170,共5页Chinese Journal of Lasers

基　　金：国家自然科学基金青年科学基金(61108041)资助课题

摘　　要：基于光纤干涉投影傅里叶变换轮廓术,提出了减小其测量物体形貌中误差的方法。在理论上分析了光纤干涉在接收屏上的光强分布,并通过分析得到其强度满足一定的高斯分布。在条纹预处理过程中对其进行光强校正,校正后的条纹频谱基频成分更加清晰。分析了条纹非正弦性引起的相位误差,在测量结果上对其进行补偿。通过仿真实验得出,经过所提出方法处理后的面形恢复精度比未处理前有了很大程度的提高。实物实验对给定标准件进行测量,验证了这种方法的正确性。To reduce the error in the measurement of object morphology, a method based on Fourier transform profilometry with optical fiber projection grating is proposed. The method analyzes the light intensity distribution that is projected on the receiver screen in theory. Its intensity meets certain Gaussian distribution by analyzing. The intensity correction is made in the process of fringe pretreatment and after correction the fundamental frequency components of stripes spectrum are clearer; the error that is brought by the non-sinusoidal stripe is compensated in the measurement of outcome. The simulation result shows that the accuracy of shape restoration has been greatly improved by the proposed method. The experiments on a standard object verify this method.

关 键 词：测量 光学测量 光纤投影 傅里叶变换 三维面形测量 

分 类 号：O436[机械工程—光学工程]