电子器件无损检测光学微扫描显微热成像系统  

Optical microscanning microscope thermal imaging system for electronic devices nondestructive testing

作　　者：高美静[1] 范祥瑞[2] 顾海华[1] 吴伟龙[1] 

机构地区：[1]燕山大学信息科学与工程学院,河北省特种光纤与光纤传感重点实验室,河北秦皇岛066004 [2]东北大学秦皇岛分校计算机与通信工程学院,河北秦皇岛066004

出　　处：《激光与红外》2013年第7期779-784,共6页Laser & Infrared

基　　金：河北省科学技术研究与发展计划应用基础研究计划重点研究基础项目(No.11963545D);河北省自然科学基金(No.F2010001268;No.F2010001286);燕山大学博士基金(No.B431)项目资助

摘　　要：为了给半导体器件、印刷电路板和功率器件等电子器件提供细微热分析的手段,完成电子电路的故障检测、失效分析和可靠性检测等,本文基于非制冷焦平面探测器设计了一种新型的光学微扫描显微热像仪。介绍了系统的工作原理、系统构成、工作过程,研究推导了系统噪声等效温差(NETD)和噪声等效辐射率差(NEED)模型,为系统的设计提供了理论指导,基于Matlab完成了整个系统的图像采集处理界面设计。实际图像采集和处理结果表明了本系统设计的合理性。随着产品化,本系统将会用到其他需要显微热分析的场合,具有广泛的应用前景。In order to supply the minute thermal analysis for semiconductor, PCB and power device and complete the failure testing, invalidation analysis, reliability detection, a novel digital optical microscanning microscope thermal ima- ging system based on the uncooled focal plane detector is proposed. The operating principle and system＇ s construction are described, and the mathematical modes of noise equivalent temperature difference （NETD）and noise equivalent e- radiation difference（NEED） are derived. Furthermore the design of the software including image collection, processing and analysis are completed based on Matlab. Results of real thermal image experiments show that the system design is reasonable. With the development of the system, the digital microscope thermal imaging system can be used in other fields and has a bright prospect.

关 键 词：光学工程 光学微扫描显微热像仪 噪声等效温差 噪声等效辐射率差 电子器件 故障检测 

分 类 号：TN211[电子电信—物理电子学]