纳米尺度接触过程力学特性实验研究  

Mechanical Properties Experimental Study of Nanoscale Contact Process

作　　者：杨承铭[1] 杨晓京[1] 刘艳荣[1] 

机构地区：[1]昆明理工大学现代农业工程学院,云南昆明650500

出　　处：《机械设计与制造》2013年第7期227-229,232,共4页Machinery Design & Manufacture

基　　金：国家自然科学基金资助项目(11062003);云南省应用基础研究计划资助项目(2009ZC042M)

摘　　要：利用纳米压痕仪进行纳米尺度接触力学特性实验研究,通过金刚石探针与单晶硅试件接触作用,获得不同载荷、不同接触深度条件下的接触压入和脱离接触的位移-载荷曲线,并利用原子力显微镜对接触区域扫描,获得接触区域AFM三维形貌图。研究表明,在不同载荷条件下接触压入,随着载荷的增大,接触深度也随之增大;在不同深度条件下接触压入,随着接触深度的增大,接触作用力也随之增大。脱离接触的时候,接触区有弹性恢复,但有残余变形,接触区域表现出了塑性变形,压痕附近区域没有裂纹情况出现,载荷或接触深度越大,接触塑性变形越明显。此外,在不同载荷、不同接触深度条件下,接触区的压痕硬度和弹性模量相应有不同值,接触压痕硬度值和弹性模量值均有一定变化。Using nano-indenter to carry on nano-scale contact mechanical properties experimental study,and by using contact interaction of diamond probe and single crystal silicon specimen,contact pressure and separating contact load-displacement curve under different load and different contact depth was required.And by using the atomic force microscope to scan the contact area,it could receive AFM three-dimensional topography in the contact area.The studies have shown that,under different loading conditions the contact pressure,the contact depth is increased with the increase of load;under different depths the contact pressure,the contact force also will increase with the increase of the contact depth.When it is separating contact,there is elastic recovery in contact area,but it has residual deformation,and the contact area shows plastic deformation,and when there is no crack situation in indentation near area,the greater the load or contact depth the more obvious the contact plastic deformation.In addition,under the conditions of different loads and different contact depths,indentation hardness and elastic modulus has corresponding different values in the contact area,and the contact indentation hardness and elastic modulus have some changes.

关 键 词：纳米尺度 纳米压痕仪 原子力显微镜 接触力学 

分 类 号：TH16[机械工程—机械制造及自动化]