真空环境下电容薄膜规测量偏差的原因分析  

The reason analysis of measurement deviation about capacitance film gauge in vacuum

作　　者：杜春林[1] 常冬林[1] 许忠旭[1] 李培印[1] 

机构地区：[1]北京卫星环境工程研究所可靠性与环境工程技术重点实验室,北京100094

出　　处：《真空》2013年第4期58-60,共3页Vacuum

摘　　要：在某大型航天器的调试试验中,需使用电容薄膜规(以下简称薄膜规)进行密封舱内真空度测量,结果发现薄膜规测量数据出现了较大的偏差。本文即对这一问题进行原因分析,提出在真空环境下,薄膜本底偏移量是产生偏差的最重要原因,并有针对性地采取解决措施。The capacitance film vacuum gauge （hereinafter referred to as film gauge） was used to measure vacuum in a debugging test about large spacecraft experiment. At last we found that the measurement datas appeared large deviation. Through analysis, it was found that the film background offset mainly lead to deviation in vacuum, and the corresponding solutions were adopted,

关 键 词：薄膜规 本底偏移量 真空 偏差 

分 类 号：TB771[一般工业技术—真空技术]