衍射光栅机械刻划成槽的预控试验  

Pre-control of mechanical scratching diffractive grating

作　　者：张宝庆[1] 史国权[1] 石广丰[1] 蔡洪彬[1] 张善文[2] 

机构地区：[1]长春理工大学机电工程学院,吉林长春130022 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130022

出　　处：《光学精密工程》2013年第7期1666-1675,共10页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.5l075042);吉林省科技发展计划资助项目(No.20080534);长春理工大学科技创新基金资助项目(No.2021000422)

摘　　要：由于目前机械刻划衍射光栅加工仍依赖操作者经验,故存在成槽质量差、无法预控等问题。本文结合铝薄膜蒸镀工艺现状,采用X射线衍射法(XRD)、扫描电子显微镜法(SEM)及纳米压痕实验揭示不同薄膜样本的微观结构与力学属性,提出了制作衍射光栅的"薄膜分类试刻法"。研究结果表明,光栅刻划过程可近似等效为楔体下压过程,对"低弹性模量类"薄膜,可采用滑移线场进行解析求解并一次试刻成槽;对"弹塑性类"薄膜,可采用有限元模拟实验进行成槽预控。该方法可预先对薄膜甄别分类,用不同的计算方法确定不同种类薄膜的工装参数,进而刻划出近乎完美的槽形;同时减少了试验刻划耗时与浪费,提高了成槽质量与刻划效率;为刻划更加精密的光栅奠定了基础。As the mechanical scratching of diffraction gratings still depends on the experiences of operators,it gives poor grooved quality and can not be pre-controlled.This paper proposes a diffraction grating production method： film classification test engraving method based on an aluminum thin film deposition process status quo,and reveals the microstructure and mechanical properties of different thin film samples based on X-ray Diffraction（XRD）,Scanning Electron Microscope（SEM） and nanoindentation experiments.The study results show that the grating ruling can be approximately equivalent to a wedge under the pressure of the process,so that the slip-line field can be used to obtain the solution analytically and carve the slot on time trial for the ＂low elastic modulus class＂ film.Moreover,the finite element simulation can be used to pre-control the slot for ＂elastoplastic class＂.The method can implement the pre-classification of the films,and can determine the tool processing parameters for different types of films with different methods.Futhermore,a near-perfect trough is scratched.Experiments show that the time-consuming and pre-engraving test times are reduced and the graving quality and efficiency are improved.The method lays the foundation for improving the characteristics of more sophisticated gratings.

关 键 词：衍射光栅 机械刻划 成槽工艺 预控技术 

分 类 号：TN305[电子电信—物理电子学] O436.1[机械工程—光学工程]