真空摩擦磨损试验机的真空系统设计  

Design of Vacuum System for Vacuum Tribometer

作　　者：曾群锋[1] 于飞[1] 

机构地区：[1]西安交通大学现代设计及转子轴承系统教育部重点实验室,西安710049

出　　处：《真空科学与技术学报》2013年第7期627-631,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家基础研究973项目(2009CB 724206);中央高校基本科研业务费资助课题

摘　　要：真空摩擦磨损试验机主要用于评定金属和非金属材料在真空状态下的摩擦磨损性能,其性能测试的精确性和可靠性直接依赖于试验机的真空系统。本文设计的真空摩擦磨损试验机真空系统包括真空获得系统、真空测量系统和真空室。真空获得系统采用分子泵和机械泵串联抽取真空,可使系统获得10-5 Pa的极限真空度。真空测量系统采用由电阻规和电离规组成的复合真空计。文中详细设计了真空室的结构、壁厚等,并采用商业有限元软件Ansys分析了其应力和应变。理论计算分析表明,该真空室强度满足设计要求。The vacuum system was designed and constructed to house the tribometer, which is capable of accuratelyevaluating the tribological characteristics, such as the surface friction and wear properties, in vacuum and/or in an envi-ronment of low pressure N2 and noble gases, of a variety of materials widely used in space industry. The newly-developedvacuum system mainly consists of a stainless steel vacuum chamber with standardized parts, including flanges, vacuumvalves and view-port,turbo-molecular and mechanical pumps,and resistance and ionization gauges.The lowest base pres-sure of the vacuum system was found to be lower than 10-5 Pa. In addition, the stress and strain of the vacuum chamberwere simulated in finite element method with the software package Ansys. The simulated results show that the strength ofthe vacuum chamber meets the technological requirements.

关 键 词：真空摩擦磨损试验机 真空系统 真空室 ANSYS 

分 类 号：TH69[机械工程—机械制造及自动化]